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Development of a secondary-electron ion-microscope for micr..:

Garty, G. ; Randers-Pehrson, G. ; Brenner, D.J.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  231 (2005)  1-4 - p. 60-64 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.01.035