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A progress review of proton beam writing applications in mi..:

Bettiol, A.A. ; Sum, T.C. ; Cheong, F.C....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  231 (2005)  1-4 - p. 364-371 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.01.084