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Radiation effects microscopy for failure analysis of microe..:

Vizkelethy, G. ; Doyle, B.L. ; Brice, D.K....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  231 (2005)  1-4 - p. 467-475 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.01.102