I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Ultra-shallow junction formation by B18H22 ion implantation:

Kawasaki, Y. ; Kuroi, T. ; Yamashita, T....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 25-29 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.04.073