I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Optimization of pre-amorphization and dopant implant condit..:

Felch, S.B. ; Graoui, H. ; Tsai, G..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 35-40 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.04.075