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Poly-Si gate engineering for advanced CMOS transistors by g..:

Bourdon, H. ; Juhel, M. ; Oudet, B...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 148-154 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.04.090