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Influence of co-implantation on the activation and diffusio..:

Herden, Marc ; Gehre, Daniel ; Feudel, Thomas...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 203-207 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.04.101