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Thermal stability enhancement of silicides by using N2 and ..:

Luoh, Tuung ; Liou, Maggie ; Liu, Hung-Wei...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 213-216 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.04.103