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New method of Plasma doping with in-situ Helium pre-amorphi..:

Sasaki, Y. ; Jin, C.G. ; Okashita, K....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 41-45 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.04.109