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Tuning for optimal performance in angle control, uniformity..:

Liebert, Reuel B. ; Olson, Joseph C. ; Arevalo, Edwin A..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  237 (2005)  1-2 - p. 365-371 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.05.037