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EUV emission from xenon in the 10–80nm wavelength range usi..:

Merabet, H. ; Kondagari, S. ; Bruch, R....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  241 (2005)  1-4 - p. 23-29 , 2005
Link: https://doi.org/10.1016/j.nimb.2005.07.233