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Infrared spectroscopy investigation of various plasma-depos..:

Gelamo, R.V. ; Trasferetti, B.C. ; Durrant, S.F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  249 (2006)  1-2 - p. 162-166 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.03.105