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Irradiation-induced damage in porous low-k materials during..:

Giangrandi, S. ; Brijs, B. ; Sajavaara, T....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  249 (2006)  1-2 - p. 189-192 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.03.111