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P2 dimer implantation in silicon: A molecular dynamics stud:

Wilson, H.F. ; Prawer, S. ; Spizzirri, P.G....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  251 (2006)  2 - p. 395-401 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.04.172