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Ion beam mixing of an embedded Ta marker layer in Si induce..:

Shi, Ping ; Ding, Fu-Rong ; Wang, Yao..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  251 (2006)  1 - p. 306-309 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.05.026