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Light-emitting silicon films fabricated by neutral cluster ..:

Honda, Yukako ; Shida, Shigenari ; Goda, Kazuo.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  251 (2006)  1 - p. 109-114 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.06.008