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Ultra-shallow junction by laser annealing: Integration issu..:

La Magna, Antonino ; Alippi, Paola ; Deretzis, Ioannis...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  253 (2006)  1-2 - p. 1-8 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.10.004