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Laser annealing of plasma implanted boron for ultra-shallow..:

Florakis, A. ; Tsoukalas, D. ; Zergioti, I....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  253 (2006)  1-2 - p. 13-17 , 2006
Link: https://doi.org/10.1016/j.nimb.2006.10.006