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Nanofabrication on a Si surface by slow highly charged ion ..:

Tona, Masahide ; Watanabe, Hirofumi ; Takahashi, Satoshi...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  256 (2007)  1 - p. 543-546 , 2007
Link: https://doi.org/10.1016/j.nimb.2006.12.057