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Sputtering source of cluster ions and surface-ionization so..:

Rasulev, U.Kh. ; Morozov, S.N. ; Khasanov, U..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  258 (2007)  1 - p. 234-237 , 2007
Link: https://doi.org/10.1016/j.nimb.2006.12.107