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Lamp annealing effects on the formation process of implante..:

Iwayama, T.S. ; Hama, T. ; Hole, D.E.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  257 (2007)  1-2 - p. 85-89 , 2007
Link: https://doi.org/10.1016/j.nimb.2006.12.166