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Formation of germanium shallow junction by flash annealing:

Satta, A. ; D'Amore, A. ; Simoen, E....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  257 (2007)  1-2 - p. 157-160 , 2007
Link: https://doi.org/10.1016/j.nimb.2006.12.191