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Research on ion implantation effect on SIMOX material modif..:

Zhanga, E.X. ; Zhang, Zh.X. ; Chen, J....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  257 (2007)  1-2 - p. 199-202 , 2007
Link: https://doi.org/10.1016/j.nimb.2007.01.259