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Fabrication of nanofluidic devices utilizing proton beam wr..:

Wang, L.P. ; Shao, P.G. ; van Kan, J.A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  260 (2007)  1 - p. 450-454 , 2007
Link: https://doi.org/10.1016/j.nimb.2007.02.062