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A compact micro-beam system using a tapered glass capillary..:

Hasegawa, Jun ; Shiba, Shigeki ; Fukuda, Hitoshi.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  266 (2008)  10 - p. 2125-2129 , 2008
Link: https://doi.org/10.1016/j.nimb.2008.02.051