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Investigation of dose characteristics in three-dimensional ..:

Lee, Jason J.S. ; Tsai, Chia-Jung ; Lo, Man-Kuok...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  266 (2008)  10 - p. 2199-2202 , 2008
Link: https://doi.org/10.1016/j.nimb.2008.02.074