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High fluence nitrogen implantation in Al/Ti multilayers:

Peruško, D. ; Milosavljević, M. ; Milinović, V....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  266 (2008)  10 - p. 2503-2506 , 2008
Link: https://doi.org/10.1016/j.nimb.2008.03.034