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Multilane shave-off profiling for build-up circuit:

Fujii, M. ; Ishizaki, Y. ; Nojima, M...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  267 (2009)  4 - p. 660-664 , 2009
Link: https://doi.org/10.1016/j.nimb.2008.11.046