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Simulation and fitting of high resolution Rutherford backsc..:

Borschel, Christian ; Schnell, Martin ; Ronning, Carsten.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  267 (2009)  8-9 - p. 1737-1739 , 2009
Link: https://doi.org/10.1016/j.nimb.2009.01.084