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The single-particle microbeam facility at CEA-Saclay:

Khodja, H. ; Hanot, M. ; Carrière, M...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  267 (2009)  12-13 - p. 1999-2002 , 2009
Link: https://doi.org/10.1016/j.nimb.2009.03.040