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Fabrication of a microreactor by proton beam writing techni..:

Huszank, R. ; Szilasi, S.Z. ; Vad, K..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  267 (2009)  12-13 - p. 2299-2301 , 2009
Link: https://doi.org/10.1016/j.nimb.2009.03.046