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Si micro-turbine by proton beam writing and porous silicon ..:

Rajta, I. ; Szilasi, S.Z. ; Fürjes, P...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  267 (2009)  12-13 - p. 2292-2295 , 2009
Link: https://doi.org/10.1016/j.nimb.2009.03.087