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Dislocation generation related to micro-cracks in Si wafers..:

Danilewsky, A. ; Wittge, J. ; Hess, A....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  268 (2010)  3-4 - p. 399-402 , 2010
Link: https://doi.org/10.1016/j.nimb.2009.09.013