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Evolution of the 2D surface structure of a silicon pitch gr..:

Bizyukov, Ivan ; Mutzke, Andreas ; Schneider, Ralf.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  268 (2010)  17-18 - p. 2631-2638 , 2010
Link: https://doi.org/10.1016/j.nimb.2010.06.035