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Development of a geometric uncertainty model describing the..:

Trivelpiece, Cory L. ; Brenizer, J.S.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  269 (2011)  1 - p. 45-52 , 2011
Link: https://doi.org/10.1016/j.nimb.2010.10.005