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Depth resolution enhancement by combined DSIMS and TOF-LEIS..:

Bábor, Petr ; Duda, Radek ; Průša, Stanislav...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  269 (2011)  3 - p. 369-373 , 2011
Link: https://doi.org/10.1016/j.nimb.2010.11.087