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Characterization of silicon ion-implanted GaN and AlGaN:

Nomoto, Kazuki ; Toyoda, Yuki ; Satoh, Masataka..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  272 (2012)  - p. 125-127 , 2012
Link: https://doi.org/10.1016/j.nimb.2011.01.047