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Roughening and smoothing behavior of single crystal Si by l..:

Pahlovy, S.A. ; Mahmud, S.F. ; Yanagimoto, K...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  272 (2012)  - p. 206-209 , 2012
Link: https://doi.org/10.1016/j.nimb.2011.01.066