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Micro-fluidic target chamber machined by proton beam writin..:

Feder, René ; Menzel, Frank ; Butz, Tilman
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  269 (2011)  20 - p. 2439-2443 , 2011
Link: https://doi.org/10.1016/j.nimb.2011.02.048