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In situ combined synchrotron X-ray diffraction and wafer cu..:

Fouet, J. ; Richard, M.-I. ; Mocuta, C...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  284 (2012)  - p. 74-77 , 2012
Link: https://doi.org/10.1016/j.nimb.2011.07.019