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Free radical kinetics in a plasma immersion ion implanted p..:

Kosobrodova, Elena A. ; Kondyurin, Alexey V. ; Fisher, Keith...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  280 (2012)  - p. 26-35 , 2012
Link: https://doi.org/10.1016/j.nimb.2012.02.028