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Study of interaction of C+ ion beam with a Si pitch grating..:

Mutzke, Andreas ; Bizyukov, Ivan ; Langhuth, Hagen...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  293 (2012)  - p. 11-15 , 2012
Link: https://doi.org/10.1016/j.nimb.2012.09.017