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Quantitative elemental microscopy on lateral highly inhomog..:

Wunderlich, R. ; Klingner, N. ; Vogt, J..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  306 (2013)  - p. 85-89 , 2013
Link: https://doi.org/10.1016/j.nimb.2012.11.048