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Three-dimensional metamaterials fabricated using Proton Bea..:

Bettiol, A.A. ; Turaga, S.P. ; Yan, Y...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  306 (2013)  - p. 271-274 , 2013
Link: https://doi.org/10.1016/j.nimb.2012.11.050