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Tailoring of SiC nanoprecipitates formed in Si:

Velisa, G. ; Trocellier, P. ; Thomé, L....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  307 (2013)  - p. 165-170 , 2013
Link: https://doi.org/10.1016/j.nimb.2012.12.089