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Investigations on the characterization of ion implanted hex..:

Aradi, E. ; Naidoo, S.R. ; Erasmus, R.M...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  307 (2013)  - p. 214-217 , 2013
Link: https://doi.org/10.1016/j.nimb.2012.12.118