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Preparation and optical properties of sputtered-deposition ..:

Pei, Lei ; Jiaqi, Zhu ; Yuankun, Zhu.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  307 (2013)  - p. 429-433 , 2013
Link: https://doi.org/10.1016/j.nimb.2013.02.047