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Annealing behavior of impurities and defects in keV Er-impl..:

Jia, Chuan-Lei ; Zhang, Tong
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  304 (2013)  - p. 1-4 , 2013
Link: https://doi.org/10.1016/j.nimb.2013.03.055