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Quantification of the number of Si interstitials formed by ..:

Darras, F.-X. ; Cherkashin, N. ; Cristiano, F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  327 (2014)  - p. 29-32 , 2014
Link: https://doi.org/10.1016/j.nimb.2013.09.045