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IBA study of SiGe/SiO2 nanostructured multilayers:

Barradas, Nuno P. ; Alves, E. ; Vieira, E.M.F....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  331 (2014)  - p. 89-92 , 2014
Link: https://doi.org/10.1016/j.nimb.2013.11.025